Title :
Cold-container crystal growth of “last-to-freeze” silicon samples, and enhanced detection of metallic impurities by ICP-MS
Author :
Ciszek, T.F. ; Gotts, Hugh E.
Author_Institution :
Siliconsultant Div., Geolite, Evergreen, CO, USA
Abstract :
Inductively-coupled cold containers are used to melt silicon samples of various shapes, and the electromagnetic forces on the melt form an isolated, well-controlled last-to-freeze region where impurities in the sample are concentrated by their small segregation coefficients. Inductively-coupled plasma mass spectrographic (ICP-MS) values for impurity concentrations in the ~0.1 g enriched region are related back to the ~30 g original sample, providing lower limits for impurity concentrations that are below the typical ICP-MS 0.1 ppb detection limit. There is no rod or granular sample geometry restriction as with float-zone impurity concentration techniques, and no obfuscating impurity introduction from quartz crucibles or graphite hot zones.
Keywords :
crystal growth from melt; elemental semiconductors; impurities; mass spectra; melting; silicon; solar cells; ICP-MS; Si; cold-container crystal growth; electromagnetic forces; enhanced metallic impurity detection; float-zone impurity concentration techniques; graphite hot zones; inductively-coupled cold containers; inductively-coupled plasma mass spectrographic values; last-to-freeze silicon samples; quartz crucibles; silicon sample melting; small segregation coefficients; Boats; Copper; Impurities; Silicon; Standards; ICP-MS; crystal growth; impurity analysis; metal impurities; silicon; silicon feedstock;
Conference_Titel :
Photovoltaic Specialist Conference (PVSC), 2014 IEEE 40th
Conference_Location :
Denver, CO
DOI :
10.1109/PVSC.2014.6925555