DocumentCode
122209
Title
High efficiency solar cells on direct kerfless 156 mm mono crystalline Si wafers by high throughput epitaxial growth
Author
Ruiying Hao ; Ravi, T.S. ; Siva, V. ; Vatus, Jean ; Miller, David ; Custodio, Joel ; Moyers, Ken ; Chia-Wei Chen ; Upadhyaya, Ajay ; Rohatgi, Ajeet
Author_Institution
Crystal Solar Inc., Santa Clara, CA, USA
fYear
2014
fDate
8-13 June 2014
Firstpage
2978
Lastpage
2982
Abstract
This paper demonstrates the Direct Gas to Wafer™ technology to produce high quality epitaxial kerfless mono crystalline n-type and p-type silicon wafers. The key aspects of the approach involve anodic etching to form porous Si release layer, growing epitaxial wafers, separation of the epitaxial wafers from the substrate and substrate reuse. The advantages of epitaxial wafers over conventional Cz wafers are discussed. With 156 mm epitaxial wafers, p-type PERC cell has achieved an efficiency of 19.7% and n-type cell has achieved an efficiency above 20%.
Keywords
elemental semiconductors; epitaxial growth; etching; silicon; solar cells; Si; anodic etching; direct gas to wafer technology; direct kerfless monocrystalline silicon wafers; epitaxial wafers; high efficiency solar cells; high throughput epitaxial growth; n-type cell; n-type silicon wafers; p-type PERC cell; p-type silicon wafers; size 156 mm; Epitaxial growth; MONOS devices; Mechanical variables measurement; Q measurement; Silicon; Silicon compounds; Substrates; Kerfless; epitaxial; silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Photovoltaic Specialist Conference (PVSC), 2014 IEEE 40th
Conference_Location
Denver, CO
Type
conf
DOI
10.1109/PVSC.2014.6925557
Filename
6925557
Link To Document