Photolithographic Fabrication and Physiological Performance of Microelectrode Arrays for Neural Stimulation

The development of an auditory cochlear prosthesis which works by direct electrical stimulation of the auditory nerve creates the need for a multielectrode stimulation array which is small in size, rugged, resistant to electrolysis, and stable and reproducible in its electrical and mechanical properties. This paper describes the fabrication of such microelectrode arrays using planar lithographic techniques.