DocumentCode
1223188
Title
Guest Editorial
Author
Dean, Robert Neal, Jr. ; Luque, Antonio
Volume
56
Issue
4
fYear
2009
fDate
4/1/2009 12:00:00 AM
Firstpage
911
Lastpage
912
Abstract
The 26 papers in this special section present advances in microelectromechanical systems.
Keywords
Chemical processes; Defense industry; Fabrication; Force feedback; Lithography; Micromechanical devices; Optical resonators; Predictive models; Sensor systems; Silicon;
fLanguage
English
Journal_Title
Industrial Electronics, IEEE Transactions on
Publisher
ieee
ISSN
0278-0046
Type
jour
DOI
10.1109/TIE.2009.2014679
Filename
4809283
Link To Document