Title :
Silicon planar technology for single-photon optical detectors
Author :
Sciacca, Emilio ; Giudice, Andrea C. ; Sanfilippo, Delfo ; Zappa, Franco ; Lombardo, Salvatore ; Consentino, Rosario ; Di Franco, Cinzia ; Ghioni, Massimo ; Fallica, Giorgio ; Bonanno, Giovanni ; Cova, Sergio ; Rimini, Emanuele
Author_Institution :
Dept. of Phys., Univ. of Catania, Italy
fDate :
4/1/2003 12:00:00 AM
Abstract :
Design and fabrication of single photon avalanche detector (SPAD) in planar technology is reported. Device design and critical issues in the technology are discussed. Experimental test procedures are described for dark-counting rate, afterpulsing probability, photon timing resolution, and quantum detection efficiency. Low-noise detectors are obtained, with dark counting rates down to 10 c/s for devices with 10 μm diameter, down to 1 kc/s for 50 μm diameter. The technology is suitable for monolithic integration of SPAD detectors and associated circuits.
Keywords :
avalanche photodiodes; elemental semiconductors; photon counting; semiconductor device testing; silicon; 10 micron; 50 micron; SPAD; Si; afterpulsing probability; dark-counting rate; low-noise detectors; photon timing resolution; quantum detection efficiency; silicon planar technology; single photon avalanche detector; single-photon optical detectors; test procedures; CMOS technology; Cathodes; Circuit testing; Fabrication; Optical detectors; Photonics; Physics; Silicon; Solid state circuits; Timing;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2003.812095
