Title :
Structure and Properties of RF Sputtered ZnO Transducers
Author :
Fahmy, Aly H. ; Adler, Eric L.
fDate :
7/1/1972 12:00:00 AM
Keywords :
Crystalline materials; Crystallization; Crystallography; Piezoelectric materials; Radio frequency; Semiconductor materials; Sputtering; Substrates; Transducers; Zinc oxide;
Journal_Title :
Sonics and Ultrasonics, IEEE Transactions on
DOI :
10.1109/T-SU.1972.29684
