DocumentCode
1223717
Title
Structure and Properties of RF Sputtered ZnO Transducers
Author
Fahmy, Aly H. ; Adler, Eric L.
Volume
19
Issue
3
fYear
1972
fDate
7/1/1972 12:00:00 AM
Firstpage
346
Lastpage
349
Keywords
Crystalline materials; Crystallization; Crystallography; Piezoelectric materials; Radio frequency; Semiconductor materials; Sputtering; Substrates; Transducers; Zinc oxide;
fLanguage
English
Journal_Title
Sonics and Ultrasonics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9537
Type
jour
DOI
10.1109/T-SU.1972.29684
Filename
1538689
Link To Document