Title :
Photothermal surface-micromachined actuators
Author :
Oliver, Andrew D. ; Vigil, Steven R. ; Gianchandani, Yogesh B.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
fDate :
4/1/2003 12:00:00 AM
Abstract :
We report on the optical actuation of surface micromachines. Optical energy is absorbed by the micromachines and converted to heat, which causes differential thermal expansion between different parts of the device and up to 12 μm of displacement. The polysilicon actuators are homogenous and electrically isolated.
Keywords :
microactuators; micromachining; optical isolators; photothermal effects; thermal expansion; Si; electrical isolation; microelectromechanical device; optical actuation; photothermal actuator; polysilicon microactuator; surface micromachining; thermal expansion; Actuators; Isolators; Laboratories; Leg; Microelectromechanical devices; Optical beams; Optical design; Optical devices; Photothermal effects; Thermal expansion;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2003.812505
