MEMS characterization with conformal imaging vibrometry (CIV)

This paper discusses a new conformal imaging fiber-optic heterodyne vibrometer developed for in-vacuum measurement of MEMS micro-resonator spatial dynamics in real time. The all-fiber optic probe design incorporates many standard fiber-optic telecommunications components, configured to enable light delivery directly to the MEMS device under test in vacuum. The CIV measures the equatorial dynamics of micro-shells currently being developed as microscale hemispherical resonant gyroscopes (HRG). The modular fiber optic design lends itself readily to other conformal configurations (e.g planar, multi-faceted) or to simultaneous measurement of shell, stem and substrate dynamics.