Fabrication and scanning-angle temperature dependence of metal-based, optical resonant scanners with PZT actuation

Metal-based, optical scanning devices with a large mirror size of 1 mm² and a wide scanning angle of over 90deg were fabricated. A high optical scanning angle (90deg) was achieved at a resonance frequency of 7.33 kHz and a driving voltage of 80 V (peak-to-peak) in ambient air without vacuum packaging. We compared the performance of metal-based, optical scanners driven by PZT bulk ceramic and aerosol-deposited PZT thick films over the temperature range from -20degC to 80degC in an environmental chamber.