DocumentCode

1225032

Title

Excitation of Shear Mode Elastic Waves in Co-Sputtered ZnO Films

Author

Wasa, Kiyotaka ; Hayakawa, Shigeru ; Hada, Toshio

Volume

21

Issue

4

fYear

1974

Firstpage

298

Lastpage

299

Keywords

Aluminum; Anodes; Cathodes; Electrodes; Glass; Optical films; Reproducibility of results; Sputtering; Substrates; Zinc oxide;

fLanguage

English

Journal_Title

Sonics and Ultrasonics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9537

Type

jour

DOI

10.1109/T-SU.1974.29831

Filename

1538836