Title :
Surface-micromachined tunable three-dimensional solid Fabry-Perot etalons with dielectric coatings
Author :
Shen, J.L. ; Lin, L.Y. ; Lee, S.S. ; Wu, M.C. ; Sergent, M.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
fDate :
12/7/1995 12:00:00 AM
Abstract :
Tunable three-dimensional solid Fabry-Perot etalons with multilayer dielectric coatings have been successfully demonstrated. The out-of-plane etalon is monolithically integrated with a rotation stage using the surface-micromachining technique. A wavelength tuning range of 58.5 nm has been achieved at 1.3 μm wavelength using the on-chip rotation stage
Keywords :
Fabry-Perot interferometers; integrated optics; micromachining; optical fabrication; tuning; 1.3 micrometre; dielectric coatings; on-chip rotation stage; out-of-plane etalon; rotation stage; surface-micromachining technique; three-dimensional solid Fabry-Perot etalons; wavelength tuning range;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19951464
