Title :
Electro-optic probing of RF signals in submicrometre MMIC devices
Author :
David, G. ; Bussek, P. ; Auer, U. ; Tegude, F.J. ; Jäger, D.
Author_Institution :
Gerhard-Mercator-Univ., Duisburg, Germany
fDate :
12/7/1995 12:00:00 AM
Abstract :
A high resolution electro-optic measurement system for probing RF electric field distributions in submicrometre MMIC devices is presented. As an example, field distributions in an interdigital structure are displayed, revealing a spatial resolution of much less than 0.5 μm. This feature makes electro-optic probing a unique technique for circuit- and also device-internal measurements of electrical signals combining high bandwidth and noninvasiveness with submicrometre resolution
Keywords :
MMIC; electric field measurement; electro-optical effects; integrated circuit measurement; microwave measurement; RF signals; bandwidth; electric field distribution; electro-optic probing; interdigital structure; internal measurement; noninvasiveness; spatial resolution; submicrometre MMIC devices;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19951465
