Title :
A 2.2-μm-Pitch Single-Transistor Charge-Modulation Pixel in a 0.13-μm CMOS Process
Author :
Tournier, Arnaud ; Lu, Guo-Neng ; Roy, François ; Deschamps, Benoit
Author_Institution :
Front-End Technol. and Manuf. Group
Abstract :
This paper presents the investigation of a 2.2-mum-pitch single-transistor pixel designed in a 0.13-mum CMOS process. Based on charge-induced potential variation of the floating-body of the transistor, this single pixel device can be operated to perform photodetection, charge integration, signal readout, and reset. The main electrical characteristics of the pixel are evaluated by device modeling and simulations as well as measurements of test chips. With optimization of process and electrical parameters, testing results show a conversion factor of 47 muV/hole, a charge-handling capability of 3500 holes, a temporal noise of four holes, and a dynamic range of 40 dB.
Keywords :
CMOS image sensors; optimisation; transistors; CMOS process; charge integration; charge-modulation; optimization; photodetection; signal readout; single-transistor pixel; size 0.13 mum; CMOS image sensors; CMOS process; CMOS technology; Electric variables; Laboratories; Pixel; Research and development; Semiconductor device measurement; Semiconductor device modeling; Testing; CMOS image sensors; Charge modulation; pixel structure;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2007.904247