Title :
A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip
Author :
Carballo, Victor Manuel Blanco ; Chefdeville, Maximilien ; Fransen, Martin ; van der Graaf, Harry ; Melai, Joost ; Salm, Cora ; Schmitz, Jurriaan ; Timmermans, Jan
Author_Institution :
Inst. for Nanotechnol., Univ. of Twente, Enschede
fDate :
6/1/2008 12:00:00 AM
Abstract :
An unpackaged microchip is used as the sensing element in a miniaturized gaseous proportional chamber. This letter reports on the fabrication and performance of a complete radiation imaging detector based on this principle. Our fabrication schemes are based on wafer-scale and chip-scale postprocessing. Compared to hybrid-assembled gaseous detectors, our microsystem shows superior alignment precision and energy resolution, and offers the capability to unambiguously reconstruct 3D radiation tracks on the spot.
Keywords :
CMOS image sensors; CMOS integrated circuits; chip scale packaging; wafer-scale integration; CMOS chip postprocessing; chip-scale postprocessing; hybrid-assembled gaseous detector; radiation imaging detector; unpackaged microchip; wafer-scale postprocessing; Anodes; CMOS image sensors; Conducting materials; Electrons; Energy resolution; Fabrication; Pulse amplifiers; Radiation detectors; Radiation imaging; Resists; Microsensors; SU-8; nuclear imaging; radiation detectors; wafer postprocessing; wafer-scale integration;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2008.925649
