Surface micromachined Fabry-Perot tunable filter

Author

Tran, A.T.T.D. ; Lo, Y.H. ; Zhu, Z.H. ; Haronian, D. ; Mozdy, E.

Author_Institution

Dept. of Appl. & Eng. Phys., Cornell Univ., Ithaca, NY, USA

Volume

8

Issue

3

fYear

1996

fDate

3/1/1996 12:00:00 AM

Firstpage

393

Lastpage

395

Abstract

We report the fabrication of a wavelength tunable optical filter using surface micromachining technology. The center wavelength is 1.517 μm and the transmission bandwidth is 5 nm. The device with a 50-μm diameter aperture has an optical loss of about 5 dB. A continuous wavelength tuning of 60 nm has been demonstrated. This device may find applications in optical sensing and wavelength division multiplexing systems, and can be readily integrated with surface emitting lasers, modulators, and detectors.

Keywords

electro-optical filters; integrated optics; integrated optoelectronics; micromachining; multiplexing equipment; optical communication equipment; optical fabrication; tuning; wavelength division multiplexing; 1.517 mum; 5 dB; 50 mum; center wavelength; continuous wavelength tuning; diameter aperture; integrated optics; integrated optoelectronics; optical loss; optical sensing; surface micromachined Fabry-Perot tunable filter; surface micromachining technology; transmission bandwidth; wavelength division multiplexing systems; wavelength tunable optical filter fabrication; Fabry-Perot; Laser tuning; Micromachining; Optical device fabrication; Optical filters; Optical sensors; Optical surface waves; Surface emitting lasers; Surface waves; Tunable circuits and devices;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.481128

Filename

481128