Title :
Laser-to-fiber coupling module using a micromachined alignment mirror
Author :
Daneman, M.J. ; Solgaard, O. ; Tien, N.C. ; Lau, K.Y. ; Muller, R.S.
Author_Institution :
California Univ., Berkeley, CA, USA
fDate :
3/1/1996 12:00:00 AM
Abstract :
We report the fabrication of a laser-to-fiber coupling module that incorporates a movable silicon-micromachined alignment micromirror. The micromirror can position a beam on a fiber within a 0.17 μm standard deviation and has a range of motion of more than 200 μm. Measurements on the module have shown a reproducible coupling efficiency of 40%. The coupling module provides a means to compensate for placement inaccuracies of passively assembled optical components.
Keywords :
distributed feedback lasers; integrated optics; micromachining; mirrors; optical fabrication; optical fibre couplers; semiconductor lasers; 200 mum; 40 percent; coupling module; laser-to-fiber coupling module; micromachined alignment mirror; movable silicon-micromachined alignment micromirror fabrication; passively assembled optical components; placement inaccuracies compensation; reproducible coupling efficiency; standard deviation; Electrons; Etching; Fiber lasers; Laser beams; Laser modes; Lenses; Micromirrors; Mirrors; Optical coupling; Optical design;
Journal_Title :
Photonics Technology Letters, IEEE
