DocumentCode
1227336
Title
Dislocation related issues in the degradation of GaN-based laser diodes
Author
Tomiya, Shigetaka ; Hino, Tomonori ; Goto, Shu ; Takeya, Motonobu ; Ikeda, Masao
Author_Institution
Mater. Anal. Center, Sony Corp., Kanagawa, Japan
Volume
10
Issue
6
fYear
2004
Firstpage
1277
Lastpage
1286
Abstract
We investigate degraded GaN-based laser diodes (LDs) on epitaxial lateral overgrown GaN layers in terms of dislocations. Almost all of the threading dislocations that appear in the wing regions are a-type dislocations. Their origins are the lateral extension of dislocations from the seed regions that contingently bend upwards to the episurface. Comparing short-lived LDs and long-lived LDs that have almost the same power consumption, we find that the relative levels of dislocation densities in their respective active layers are different. In the degraded LDs, neither dislocation multiplication from the threading dislocations nor any structural changes of the threading dislocations are observed. This indicates that degradation is not caused by dislocation multiplication at the active layers, which is usually observed in LDs featuring zincblende-based structures. The degradation rate is almost proportional to the square root of the aging time. Our results indicate that degradation is governed by a diffusion process, and a detailed degradation mechanism is proposed.
Keywords
III-V semiconductors; ageing; diffusion; dislocation density; dislocation multiplication; gallium compounds; semiconductor device reliability; semiconductor epitaxial layers; semiconductor lasers; transmission electron microscopy; GaN; GaN-based laser diodes; a-type dislocations; aging; degradation mechanism; degraded laser diodes; diffusion process; dislocation densities; dislocation multiplication; epitaxial GaN layers; epitaxial lateral overgrowth; long-lived laser diodes; reliability; short-lived laser diodes; threading dislocations; transmission electron microscopy; zincblende-based structures; Aging; Degradation; Diode lasers; Energy consumption; Gallium nitride; Light emitting diodes; Radiative recombination; Semiconductor materials; Substrates; Transmission electron microscopy;
fLanguage
English
Journal_Title
Selected Topics in Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
1077-260X
Type
jour
DOI
10.1109/JSTQE.2004.837735
Filename
1390903
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