• DocumentCode
    1227508
  • Title

    Fabrication of SiO2 microlenses on silicone rubber using a vacuum-ultraviolet F2 laser

  • Author

    Takao, Hiromitsu ; Okoshi, Masayuki ; Miyagami, Hideyuki ; Inoue, Narumi

  • Author_Institution
    Dept. of Electr. & Electron. Eng., Nat. Defense Acad., Kanagawa, Japan
  • Volume
    10
  • Issue
    6
  • fYear
    2004
  • Firstpage
    1426
  • Lastpage
    1429
  • Abstract
    SiO2 microlenses are fabricated on a silicone rubber surface. The silicone surface irradiated by an F2 laser beam swells and is modified to SiO2 by means of photochemical reaction. When the surface is irradiated by 6000-12000 shot laser pulses, it becomes smooth and spherical. By altering the number of pulses, it is possible to alter the microlenses´ focal lengths within the range of 120-170 μm.
  • Keywords
    excimer lasers; fluorine; high-speed optical techniques; laser materials processing; microlenses; optical fabrication; photochemistry; silicon compounds; silicone rubber; F2; SiO2; SiO2 microlens fabrication; focal length; laser pulse irradiation; photochemical reaction; silicone rubber; vacuum-ultraviolet F2 laser; Laser ablation; Laser beams; Lenses; Microoptics; Optical device fabrication; Optical pulses; Photochemistry; Rubber; Scanning electron microscopy; Surface emitting lasers;
  • fLanguage
    English
  • Journal_Title
    Selected Topics in Quantum Electronics, IEEE Journal of
  • Publisher
    ieee
  • ISSN
    1077-260X
  • Type

    jour

  • DOI
    10.1109/JSTQE.2004.837707
  • Filename
    1390920
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1227508