Title :
Hollow optical fibers for ultraviolet and vacuum ultraviolet light
Author :
Matsuura, Yuji ; Miyagi, Mitsunobu
Author_Institution :
Graduate Sch. of Eng., Tohoku Univ., Sendai, Japan
Abstract :
Hollow optical fibers composed of glass capillary tubing with an inner coating of aluminum thin film are fabricated for delivery of ultraviolet and vacuum ultraviolet light. The aluminum film is formed by a chemical vapor deposition method employing a metalorganic aluminum as a precursor. Transmission properties of the aluminum-coated hollow fibers are evaluated with ArF- and F2-excimer lasers. Spectroscopy measurement in the vacuum ultraviolet region is also performed.
Keywords :
aluminium; chemical vapour deposition; excimer lasers; metallic thin films; optical fibre cladding; optical fibre fabrication; optical fibre testing; ultraviolet spectra; Al; ArF; ArF excimer laser; F2 excimer laser; F2; aluminum thin film coating; chemical vapor deposition; glass capillary tubing; hollow optical fiber fabrication; ultraviolet light; vacuum ultraviolet light; Aluminum; Chemical lasers; Chemical vapor deposition; Coatings; Fiber lasers; Glass; Optical fibers; Optical films; Performance evaluation; Spectroscopy;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/JSTQE.2004.837710
