DocumentCode
1227529
Title
Point defects in lithium fluoride by EUV and soft X-rays exposure for X-ray microscopy and optical applications
Author
Baldacchini, Giuseppe ; Bollanti, Sarah ; Bonfigli, Francesca ; Di Lazzaro, Paolo ; Faenov, Anatoly Ya ; Flora, Francesco ; Marolo, Tiziana ; Montereali, Rosa Maria ; Murra, Daniele ; Nichelatti, Enrico ; Pikuz, Tatiana ; Reale, Armando ; Reale, Lucia ; R
Author_Institution
Frascati Res. Center, Italy
Volume
10
Issue
6
fYear
2004
Firstpage
1435
Lastpage
1445
Abstract
The extreme ultraviolet radiation emitted by a laser-plasma source or by a capillary discharge laser is applied to the generation of luminescent patterns in lithium fluoride. This novel technique is able to produce colored patterns with high spatial resolution on large (more than 10 cm2) areas in a short exposure time compared with other irradiation methods like the electron beam writing. The potentials of this technique for applications in photonics are commented. This work reviews the activity performed during the past four years at the ENEA Frascati Center and at L´Aquila University, Italy. Preliminary images of microradiography or X-ray contact microscopy using lithium fluoride as an imaging detector are presented. The advantages of this new detector compared with photographic films or with photoresists are discussed.
Keywords
X-ray effects; X-ray lithography; X-ray microscopy; colour centres; image sensors; laser beam effects; lithium compounds; optical materials; photoluminescence; radiography; ultraviolet lithography; ultraviolet radiation effects; EUV radiation; LiF; X-ray microscopy; capillary discharge laser; imaging detector; laser-plasma source; lithium fluoride; luminescent pattern generation; microradiography; point defects; soft X-rays; spatial resolution; Electron beams; Fault location; Lithium compounds; Optical films; Optical microscopy; Spatial resolution; Stimulated emission; Ultraviolet sources; Writing; X-ray lasers;
fLanguage
English
Journal_Title
Selected Topics in Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
1077-260X
Type
jour
DOI
10.1109/JSTQE.2004.838080
Filename
1390922
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