• DocumentCode
    1227691
  • Title

    A differential viscosity detector for use in miniaturized chemical separation systems

  • Author

    Blom, Marko T. ; Chmela, Emil ; Van Der Heyden, Frank H J ; Oosterbroek, R. Edwin ; Tijssen, Robert ; Elwenspoek, Miko ; van den Berg, Albert

  • Author_Institution
    MESA Res. Inst., Univ. of Twente, Enschede, Netherlands
  • Volume
    14
  • Issue
    1
  • fYear
    2005
  • Firstpage
    70
  • Lastpage
    80
  • Abstract
    We present a micromachined differential viscosity detector suitable for integration into an on-chip hydrodynamic chromatography system. The general design, however, is applicable to any liquid chromatography system that is used for separation of polymers. The micromachined part of the detector consists of a fluidic Wheatstone bridge and a low hydraulic capacitance pressure sensor of which the pressure sensing is based on optical detection of a membrane deflection. The stand-alone sensor shows a resolution in specific viscosity of 3×10-3, in which specific viscosity is defined as the increase in viscosity by a sample, relative to the baseline viscosity of a solvent.
  • Keywords
    chromatography; microfluidics; micromachining; polymer melts; pressure sensors; viscometers; chemical separation systems; fluidic Wheatstone bridge; hydraulic capacitance pressure sensor; liquid chromatography system; membrane deflection; micromachining; on-chip hydro-dynamic chromatography system; optical detection; polymers separation; viscometer; viscosity detection; Bridge circuits; Capacitance; Capacitive sensors; Chemicals; Detectors; Hydrodynamics; Optical sensors; Polymers; System-on-a-chip; Viscosity;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2004.840452
  • Filename
    1390938