A ±1-g dual-axis linear accelerometer in a standard 0.5-μm CMOS technology for high-sensitivity applications

A dual-axis linear accelerometer, composed of a dual-axis acceleration sensor using a single proof mass to detect x- and y-axis acceleration and the relative fully integrated electronics front-end realized in a standard 0.5-μm CMOS technology, is proposed. The overall device features a full scale of ±1g and a sensitivity of 200 μg. No external components are required since an internal switched-capacitor low-pass filter limits the output signal band to 30 Hz. The dual-axis sensor is packaged with the electronics. In the final device, only four pins are active, plus a test pin. The device sensitivity is on-chip factory trimmed. This sensitivity is adjusted with a total accuracy of ±2.5%. The device is able to detect a minimum signal of 200 μg (which is about 80 dB lower than its full scale) and consumes 45 mW from a single 5-V supply.