Title :
Acoustic Microscopy Applied to SAW Dispersion and Film Thickness Measurement
fDate :
3/1/1980 12:00:00 AM
Keywords :
Acoustic imaging; Acoustic materials; Acoustic measurements; Acoustic pulses; Dispersion; Microscopy; Optical films; Optical imaging; Surface acoustic waves; Thickness measurement;
Journal_Title :
Sonics and Ultrasonics, IEEE Transactions on
DOI :
10.1109/T-SU.1980.31152