DocumentCode :
1228676
Title :
Acoustic Microscopy Applied to SAW Dispersion and Film Thickness Measurement
Author :
Weglein, R.D.
Volume :
27
Issue :
2
fYear :
1980
fDate :
3/1/1980 12:00:00 AM
Firstpage :
82
Lastpage :
86
Keywords :
Acoustic imaging; Acoustic materials; Acoustic measurements; Acoustic pulses; Dispersion; Microscopy; Optical films; Optical imaging; Surface acoustic waves; Thickness measurement;
fLanguage :
English
Journal_Title :
Sonics and Ultrasonics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9537
Type :
jour
DOI :
10.1109/T-SU.1980.31152
Filename :
1539228
Link To Document :
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