Title :
Aluminum Evaporation Conditions for SAW Interdigital Transducers
Author :
Temmyo, Jiro ; Yoshikawa, Shokichiro
fDate :
7/1/1980 12:00:00 AM
Keywords :
Aluminum; Artificial intelligence; Conductivity; Frequency; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature measurement; Temperature sensors; Transducers;
Journal_Title :
Sonics and Ultrasonics, IEEE Transactions on
DOI :
10.1109/T-SU.1980.31177