DocumentCode
1228906
Title
Aluminum Evaporation Conditions for SAW Interdigital Transducers
Author
Temmyo, Jiro ; Yoshikawa, Shokichiro
Volume
27
Issue
4
fYear
1980
fDate
7/1/1980 12:00:00 AM
Firstpage
219
Lastpage
220
Keywords
Aluminum; Artificial intelligence; Conductivity; Frequency; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature measurement; Temperature sensors; Transducers;
fLanguage
English
Journal_Title
Sonics and Ultrasonics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9537
Type
jour
DOI
10.1109/T-SU.1980.31177
Filename
1539253
Link To Document