Title :
ZnO Thin-Film SAW Devices
Author :
Yamazaki, Osamu ; Mitsuyu, T. ; Wasa, Kiyotaka
Keywords :
Crystalline materials; Piezoelectric films; Piezoelectric materials; Stability; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature; Thin film devices; Zinc oxide;
Journal_Title :
Sonics and Ultrasonics, IEEE Transactions on
DOI :
10.1109/T-SU.1980.31201