DocumentCode :
1229147
Title :
ZnO Thin-Film SAW Devices
Author :
Yamazaki, Osamu ; Mitsuyu, T. ; Wasa, Kiyotaka
Volume :
27
Issue :
6
fYear :
1980
Firstpage :
369
Lastpage :
378
Keywords :
Crystalline materials; Piezoelectric films; Piezoelectric materials; Stability; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature; Thin film devices; Zinc oxide;
fLanguage :
English
Journal_Title :
Sonics and Ultrasonics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9537
Type :
jour
DOI :
10.1109/T-SU.1980.31201
Filename :
1539277
Link To Document :
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