• DocumentCode
    1229162
  • Title

    Performance of 0.4-μm Linewidth SAW Interdigital Transducers Fabricated by Scanning-Electron-Beam Lithography

  • Author

    Temmyo, JLro ; Sakakibara, Yutaka ; Komatsu, Kazuhiko ; Oda, Masatoshi ; Yoshikawa, Shokichiro

  • Volume
    27
  • Issue
    6
  • fYear
    1980
  • Firstpage
    383
  • Lastpage
    384
  • Keywords
    Collision mitigation; Electrodes; Fingers; Frequency; Geometry; Insertion loss; Lithography; Resists; Surface acoustic waves; Transducers;
  • fLanguage
    English
  • Journal_Title
    Sonics and Ultrasonics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9537
  • Type

    jour

  • DOI
    10.1109/T-SU.1980.31203
  • Filename
    1539279
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1229162