DocumentCode :
1229162
Title :
Performance of 0.4-μm Linewidth SAW Interdigital Transducers Fabricated by Scanning-Electron-Beam Lithography
Author :
Temmyo, JLro ; Sakakibara, Yutaka ; Komatsu, Kazuhiko ; Oda, Masatoshi ; Yoshikawa, Shokichiro
Volume :
27
Issue :
6
fYear :
1980
Firstpage :
383
Lastpage :
384
Keywords :
Collision mitigation; Electrodes; Fingers; Frequency; Geometry; Insertion loss; Lithography; Resists; Surface acoustic waves; Transducers;
fLanguage :
English
Journal_Title :
Sonics and Ultrasonics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9537
Type :
jour
DOI :
10.1109/T-SU.1980.31203
Filename :
1539279
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1229162
