Title :
Bulk Ultrasonic Transducer Employing Piezoelectric Film on Thin Metal Sheet
Author :
White, Richard M. ; Chuang, C.T. ; Lee, Adrian C C
Keywords :
Acoustic emission; Acoustic transducers; Piezoelectric films; Piezoelectric transducers; Radio frequency; Sputtering; Steel; Substrates; Ultrasonic transducers; Zinc oxide;
Journal_Title :
Sonics and Ultrasonics, IEEE Transactions on
DOI :
10.1109/T-SU.1981.31211
