Title :
A Possible Solution for the Discrepancy Between the INRIM and NMIJ Values of the Si Lattice-Parameter
Author :
Fujimoto, Hiroyuki ; Mana, Giovanni ; Nakayama, Kan
fDate :
4/1/2007 12:00:00 AM
Abstract :
We present the results of a joint project to identify the origin of a discrepancy between the value of the Si lattice- parameter obtained by the Istituto Nazionale di Ricerca Metrologica and that obtained by the National Metrology Institute of Japan. The re-evaluation of diffraction in the laser interferometry indicates that misalignment of the interfering beams could account for the observed difference.
Keywords :
Apertures; Collimators; Diffraction; Extrapolation; Laser beams; Lattices; Metrology; Optical interferometry; Pollution measurement; Silicon; Fundamental constants; laser interferometry; silicon lattice-parameter;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
DOI :
10.1109/TIM.2007.890778
