Title :
Device Implications of the Electronic Effect in the Elastic Constants of Silicon
Author :
Keyes, Robert W.
fDate :
3/1/1982 12:00:00 AM
Keywords :
Acoustic devices; Acoustic emission; Capacitive sensors; Electron microscopy; Semiconductor device doping; Silicon; Surface acoustic wave devices; Surface acoustic waves; Temperature dependence; Velocity measurement;
Journal_Title :
Sonics and Ultrasonics, IEEE Transactions on
DOI :
10.1109/T-SU.1982.31314
