DocumentCode
1230203
Title
Device Implications of the Electronic Effect in the Elastic Constants of Silicon
Author
Keyes, Robert W.
Volume
29
Issue
2
fYear
1982
fDate
3/1/1982 12:00:00 AM
Firstpage
99
Lastpage
103
Keywords
Acoustic devices; Acoustic emission; Capacitive sensors; Electron microscopy; Semiconductor device doping; Silicon; Surface acoustic wave devices; Surface acoustic waves; Temperature dependence; Velocity measurement;
fLanguage
English
Journal_Title
Sonics and Ultrasonics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9537
Type
jour
DOI
10.1109/T-SU.1982.31314
Filename
1539390
Link To Document