Title :
Very large deflection with quadratic voltage dependence of ZnO on Si/sub 3/N/sub 4/ bimorph
Author :
Smits, Jan G. ; Choi, Wai-shing
Author_Institution :
Dept. of Electr. Eng., Boston Univ., MA, USA
fDate :
3/1/1992 12:00:00 AM
Abstract :
ZnO on Si/sub 3/N/sub 4/ bimorphs have shown large deflections with quadratic dependence on applied voltages. Several effects are suggested that might explain these large deflections. No conclusion on the origin of these large deflections can yet be given.<>
Keywords :
II-VI semiconductors; electric sensing devices; micromechanical devices; piezoelectric semiconductors; piezoelectric transducers; tactile sensors; zinc compounds; Si substrate; ZnO-Si/sub 3/N/sub 4/ bimorph; heterogeneous piezoelectric bimorph; large deflections; piezoelectric sensor; quadratic voltage dependence; tactile sensor; Electrodes; Piezoelectric materials; Resists; Silicon; Sputter etching; Sputtering; Structural beams; Tactile sensors; Voltage; Zinc oxide;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
