Title :
Optimization of Quartz SAW Resonator Structure with Groove Gratings
Author :
Uno, Takehiko ; Jumonj, Hiromichi
Keywords :
Acoustic waves; Aluminum; Design optimization; Electrodes; Fingers; Frequency; Gratings; Resonance; Sputter etching; Surface acoustic waves;
Journal_Title :
Sonics and Ultrasonics, IEEE Transactions on
DOI :
10.1109/T-SU.1982.31358
