W-band CPW RF MEMS circuits on quartz substrates

Author

Rizk, Jad B. ; Rebeiz, Gabriel M.

Author_Institution

Electr. Eng. & Comput. Sci. Dept., Univ. of Michigan, Ann Arbor, MI, USA

Volume

51

Issue

7

fYear

2003

fDate

7/1/2003 12:00:00 AM

Firstpage

1857

Lastpage

1862

Abstract

This paper presents W-band coplanar waveguide RF microelectromechanical system (MEMS) capacitive shunt switches with very low insertion loss (-0.2 to -0.5 dB) and high-isolation (≤ -30 dB) over the entire W-band frequency range. It is shown that full-wave electromagnetic modeling using Sonnet can predict the performance of RF MEMS switches up to 120 GHz. Also presented are W-band 0°/90° and 0°/180° switched-line phase shifters with very good insertion loss (1.75 dB/bit at 90 GHz) and a wide bandwidth of operation (75-100 GHz). These circuits are the first demonstration of RF MEMS digital-type phase shifters at W-band frequencies and they outperform their solid-state counterparts by a large margin.

Keywords

coplanar waveguides; digital simulation; losses; micromechanical devices; microwave switches; millimetre wave phase shifters; -0.2 to -0.5 dB; 120 GHz; 75 to 100 GHz; CPW; RF MEMS circuits; Sonnet; W-band; capacitive shunt switches; digital-type phase shifters; full-wave electromagnetic modeling; insertion loss; quartz substrates; switched-line phase shifters; Circuits; Coplanar waveguides; Electromagnetic modeling; Electromagnetic waveguides; Frequency; Insertion loss; Micromechanical devices; Phase shifters; Radiofrequency microelectromechanical systems; Switches;

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/TMTT.2003.814316

Filename

1209273