Title :
Thermal crosstalk in a group of pyroelectric sensitive elements for thermal imaging
Author :
Yoon, Yung Sup ; Samoilov, Vladimir B. ; Kletsky, Sergci V.
Author_Institution :
Res. Inst. of Semicond. & Thin Film Technol., Inha Univ., Inchon, South Korea
fDate :
6/1/2003 12:00:00 AM
Abstract :
Temperature distributions under periodical thermal excitation and the response of the thermal imaging device, composed of the group of pyroelectric sensitive elements mounted on a single silicon substrate, are presented. The sensitive element consists of a covering metal layer, infrared polymer absorber, front metal contact, sensitive pyroelectric element, the interconnecting column, and the bulk silicon readout. The results of numerical modeling show that the thermal crosstalk between sensitive elements to be critical especially at low frequency (f<10 Hz) of periodically modulated light.
Keywords :
crosstalk; image sensors; infrared imaging; modelling; pyroelectric detectors; silicon; temperature distribution; 10 Hz; 2D modeling; Si; bulk Si readout; dynamic voltage response; front metal contact; infrared polymer absorber; interconnecting column; numerical modeling; periodical thermal excitation; periodically modulated light; pyroelectric sensitive elements; single Si substrate; temperature distributions; thermal crosstalk; thermal imaging device; Crosstalk; Frequency; Infrared detectors; Numerical models; Optical modulation; Physics; Polymers; Pyroelectricity; Sensor arrays; Silicon;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2003.1209561