DocumentCode :
1232706
Title :
Acoustic Micro-Metrology
Author :
Weglein, Rolf D.
Volume :
32
Issue :
2
fYear :
1985
fDate :
3/1/1985 12:00:00 AM
Firstpage :
225
Lastpage :
234
Keywords :
Acoustic materials; Acoustic measurements; Acoustic pulses; Acoustic signal detection; Conducting materials; Crystalline materials; Frequency; Interference; Microscopy; Optical surface waves;
fLanguage :
English
Journal_Title :
Sonics and Ultrasonics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9537
Type :
jour
DOI :
10.1109/T-SU.1985.31588
Filename :
1539664
Link To Document :
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