DocumentCode
1232809
Title
An Acoustic Microscope for Subsurface Defect Characterization
Author
Ishikawa, Isao ; Kanda, Hiroshi ; Katakura, Kageyoshi
Volume
32
Issue
2
fYear
1985
fDate
3/1/1985 12:00:00 AM
Firstpage
325
Lastpage
331
Keywords
Acoustic devices; Attenuation; Conducting materials; Frequency; Lenses; Optical microscopy; Scanning electron microscopy; Semiconductor devices; Semiconductor materials; Silicon;
fLanguage
English
Journal_Title
Sonics and Ultrasonics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9537
Type
jour
DOI
10.1109/T-SU.1985.31599
Filename
1539675
Link To Document