Title :
An Acoustic Microscope for Subsurface Defect Characterization
Author :
Ishikawa, Isao ; Kanda, Hiroshi ; Katakura, Kageyoshi
fDate :
3/1/1985 12:00:00 AM
Keywords :
Acoustic devices; Attenuation; Conducting materials; Frequency; Lenses; Optical microscopy; Scanning electron microscopy; Semiconductor devices; Semiconductor materials; Silicon;
Journal_Title :
Sonics and Ultrasonics, IEEE Transactions on
DOI :
10.1109/T-SU.1985.31599
