DocumentCode
1233236
Title
Zero-Temperature-Coefficient SAW Devices on AlN Epitaxial Films
Author
Tsubouchi, Kazuo ; Mikoshiba, Nobuo
Volume
32
Issue
5
fYear
1985
Firstpage
634
Lastpage
644
Keywords
Piezoelectric films; Radio frequency; Radiofrequency integrated circuits; Semiconductor films; Silicon; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature; Thin film devices;
fLanguage
English
Journal_Title
Sonics and Ultrasonics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9537
Type
jour
DOI
10.1109/T-SU.1985.31647
Filename
1539723
Link To Document