DocumentCode
1233372
Title
Transient Behavior of Transverse Acoustoelectric Voltage and Nondestructive Characterization of Semiconductor Surfaces
Author
Davari, B. ; Das, Pankaj K.
Volume
32
Issue
5
fYear
1985
Firstpage
778
Lastpage
790
Keywords
Delay lines; Electric fields; Monitoring; Piezoelectric materials; Piezoelectric transducers; Radio frequency; Substrates; Surface acoustic waves; Surface treatment; Voltage;
fLanguage
English
Journal_Title
Sonics and Ultrasonics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9537
Type
jour
DOI
10.1109/T-SU.1985.31662
Filename
1539738
Link To Document