On-chip micromachined solenoid balun for RF-SOC applications

A transformer balun is fabricated by using a post-CMOS compatible MEMS process. The novel concave-suspended solenoid balun can be integrated with radio-frequency system-on-chips (RF-SOCs). In the frequency range 0.5-10 GHz, the tested balun shows less than 0.7 dB amplitude imbalance and less than 1.5deg phase imbalance. After tuning, the transformer balun can match between a 100 Omega single-ended port and two 50 Omega differential ports. At the two differential ports, insertion losses of -1.5 and -0.8 dB are obtained at 5-GHz centre frequency, more than 40% bandwidth of S ₁₁ is achieved.