Title :
Radiofrequency Discharge: A Low-Pressure Contactless Sonic Wave Sensor
Author :
Kumar, Devendra ; Klasinc, Leo ; Clancy, Phillip L. ; McGlynn, Sean P.
Keywords :
Acoustic pulses; Acoustic sensors; Acoustic signal detection; Acoustic waves; Coils; Detectors; Electrodes; Microphones; Optical pulse generation; Radio frequency;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/T-UFFC.1986.26863
