An automatic measurement system for electromechanical characterization of silicon pressure sensors

This paper describes a unique, self-contained automated pressure sensor test system. The system is controlled by a SUN Sparc Station, with a custom-designed menu-driven user interface in the OPENWIN window environment. It is capable of performing multiparameter measurements including bridge resistance, bridge offset voltage, delta offset voltage, breakdown voltage and sensitivity. The built-in software package allows the user to perform statistical analysis with image capability. This system is applicable to both device research, where the “statistical” testing data provides the reliable experimental information, and device mass production, where the testing data and the generated wafer map can help in product sorting, quality control, and further processing