Title :
A Quartz Resonator Pressure Transducer
Author :
Karrer, H. ; Leach, Jerry
Author_Institution :
Hewlett-Packard Laboratories, Palo Alto, Calif.
fDate :
7/1/1969 12:00:00 AM
Abstract :
A digital pressure transducer has been developed utilizing a precision 5 MHz piezoelectric quartz resonator. The circular resonator exhibits linear changes in frequency when subjected to radial compressive stresses. A cylindrical quartz tube, integral with the circular resonator, acts as a diaphragm and transfers and concentrates the stress from the applied pressure onto the periphery of the resonator. Since the tube and resonator are fabricated from a single quartz crystal, nonelastic effects are minimized. The transducer has a dynamic range of 107and a pressure range of 0 to 104psia.
Keywords :
Compressive stress; Crystallization; Dynamic range; Force measurement; Frequency conversion; Frequency measurement; Hysteresis; Piezoelectric transducers; Stability; Temperature sensors;
Journal_Title :
Industrial Electronics and Control Instrumentation, IEEE Transactions on
DOI :
10.1109/TIECI.1969.229865