• DocumentCode
    1235329
  • Title

    Silica masks for improved surface poling of lithium niobate

  • Author

    Busacca, A.C. ; Cino, A.C. ; Riva-Sanseverino, S. ; Ravaro, M. ; Assanto, G.

  • Author_Institution
    Dept. of Electr. Eng., Univ. of Palermo, Italy
  • Volume
    41
  • Issue
    2
  • fYear
    2005
  • Firstpage
    92
  • Lastpage
    94
  • Abstract
    Surface periodic poling of congruent lithium niobate was performed with the aid of photolithographically defined silica masks. The latter helped improving the control of duty cycle in the periodic domain poling, with 50:50 mark-to-space ratios. The role of silica was ascertained by numerically solving the Poisson equation.
  • Keywords
    Poisson equation; dielectric polarisation; electric domains; etching; ferroelectric thin films; integrated optics; lithium compounds; masks; nanopatterning; nonlinear optics; photolithography; photoresists; silicon compounds; LiNbO3; Poisson equation; SiO2; congruent lithium niobate; duty cycle; etching; mark-to-space ratios; nanopatterning; periodic domain poling; photolithography; silica masks; surface periodic poling;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20056984
  • Filename
    1393492
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1235329