Title :
Silica masks for improved surface poling of lithium niobate
Author :
Busacca, A.C. ; Cino, A.C. ; Riva-Sanseverino, S. ; Ravaro, M. ; Assanto, G.
Author_Institution :
Dept. of Electr. Eng., Univ. of Palermo, Italy
Abstract :
Surface periodic poling of congruent lithium niobate was performed with the aid of photolithographically defined silica masks. The latter helped improving the control of duty cycle in the periodic domain poling, with 50:50 mark-to-space ratios. The role of silica was ascertained by numerically solving the Poisson equation.
Keywords :
Poisson equation; dielectric polarisation; electric domains; etching; ferroelectric thin films; integrated optics; lithium compounds; masks; nanopatterning; nonlinear optics; photolithography; photoresists; silicon compounds; LiNbO3; Poisson equation; SiO2; congruent lithium niobate; duty cycle; etching; mark-to-space ratios; nanopatterning; periodic domain poling; photolithography; silica masks; surface periodic poling;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20056984
