Title :
Fabrication and characterization of microinductors for distributed power converters
Author :
Brandon, Erik J. ; Wesseling, Emily ; White, Victor ; Ramsey, Chris ; Castillo, Linda Del ; Lieneweg, Udo
Author_Institution :
Jet Propulsion Lab., California Inst. of Technol., Pasadena, CA, USA
fDate :
7/1/2003 12:00:00 AM
Abstract :
Inductors play a key role in DC-DC converters, but few options exist for implementing on-chip inductors for highly miniaturized, monolithic power converters. Microinductors constructed by standard microelectronic fabrication techniques with magnetic films as the core material have been investigated during the past 20 years with mixed results. A 13-mm2 microinductor based on a spiral geometry and having L = 3.2 μH and Q = 1.3 at 1 MHz is reported here. Key issues regarding microinductor design and performance are discussed.
Keywords :
DC-DC power convertors; Q-factor; magnetic thin film devices; power integrated circuits; thin film inductors; 1 MHz; DC-DC converters; distributed power electronics; integrated passive components; magnetic films; microinductors; monolithic power converters; on-chip inductors; spiral geometry; standard microelectronic fabrication techniques; Fabrication; Inductance; Inductors; Magnetic cores; Magnetic films; Magnetic flux; Magnetic materials; Spirals; Switched-mode power supply; Toroidal magnetic fields;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2003.812705
