DocumentCode
1237389
Title
MEMS actuated spherical retroreflector for free-space optical communications
Author
Jenkins, C. ; Johnstone, W. ; Uttamchandani, D. ; Handerek, V. ; Radcliffe, S.
Author_Institution
Dept. of Electron. & Electr. Eng., Univ. of Strathclyde, Glasgow, UK
Volume
41
Issue
23
fYear
2005
Firstpage
1278
Lastpage
1279
Abstract
An optical MEMS retroreflective phase modulator comprising a silicon MEMS microactuated platform to which a spherical retroreflector is attached has been investigated. The steady state and dynamic behaviour of the MEMS modulator have been experimentally measured when two different sizes of spherical retroreflectors are used. Dynamic testing shows a dominant resonant frequency response at around 200 Hz, which matches finite-element analysis for the structure.
Keywords
finite element analysis; micro-optics; micromechanical devices; optical communication equipment; optical modulation; phase modulation; MEMS actuated spherical retroreflector; finite element analysis; free-space optical communications; micro-optics; micromechanical devices; optical MEMS retroreflective phase modulator; optical modulation; phase modulation; silicon MEMS micro actuated platform; spherical retro-reflector;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20052449
Filename
1541770
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