• DocumentCode
    1237725
  • Title

    Fabrication of YBCO multi-layer wiring with a polished PBCO insulator

  • Author

    Wada, Yukihiko ; Kuroda, Ken´ichi ; Takami, Tetsuya

  • Author_Institution
    Mitsubishi Electr. Corp., Amagasaki, Japan
  • Volume
    13
  • Issue
    2
  • fYear
    2003
  • fDate
    6/1/2003 12:00:00 AM
  • Firstpage
    817
  • Lastpage
    820
  • Abstract
    In this study we have fabricated YBa2Cu3O7-x (YBCO)/PrBa2Cu3O7-x (PBCO)/YBCO multi-layer wiring and investigated its properties. We found that a polishing technique is extremely effective in the elimination of precipitates on the films without degradation in film properties. YBCO/polished-PBCO/polished-YBCO crossover with 50 μm square of overlap showed resistance of a degree of kΩ at 4.2 K while a contact of two YBCO layers through a 10 μm square of hole in the PBCO layer exhibited good superconductivity.
  • Keywords
    barium compounds; high-temperature superconductors; polishing; praseodymium compounds; superconducting superlattices; yttrium compounds; 4.2 K; PBCO insulator; YBCO multilayer wiring; YBa2Cu3O7-PrBa2Cu3O7; fabrication process; high temperature superconductor; polishing technique; Degradation; Fabrication; Insulation; Pulsed laser deposition; Rough surfaces; Substrates; Superconducting films; Surface roughness; Wiring; Yttrium barium copper oxide;
  • fLanguage
    English
  • Journal_Title
    Applied Superconductivity, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1051-8223
  • Type

    jour

  • DOI
    10.1109/TASC.2003.814052
  • Filename
    1211729
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1237725