DocumentCode :
1237725
Title :
Fabrication of YBCO multi-layer wiring with a polished PBCO insulator
Author :
Wada, Yukihiko ; Kuroda, Ken´ichi ; Takami, Tetsuya
Author_Institution :
Mitsubishi Electr. Corp., Amagasaki, Japan
Volume :
13
Issue :
2
fYear :
2003
fDate :
6/1/2003 12:00:00 AM
Firstpage :
817
Lastpage :
820
Abstract :
In this study we have fabricated YBa2Cu3O7-x (YBCO)/PrBa2Cu3O7-x (PBCO)/YBCO multi-layer wiring and investigated its properties. We found that a polishing technique is extremely effective in the elimination of precipitates on the films without degradation in film properties. YBCO/polished-PBCO/polished-YBCO crossover with 50 μm square of overlap showed resistance of a degree of kΩ at 4.2 K while a contact of two YBCO layers through a 10 μm square of hole in the PBCO layer exhibited good superconductivity.
Keywords :
barium compounds; high-temperature superconductors; polishing; praseodymium compounds; superconducting superlattices; yttrium compounds; 4.2 K; PBCO insulator; YBCO multilayer wiring; YBa2Cu3O7-PrBa2Cu3O7; fabrication process; high temperature superconductor; polishing technique; Degradation; Fabrication; Insulation; Pulsed laser deposition; Rough surfaces; Substrates; Superconducting films; Surface roughness; Wiring; Yttrium barium copper oxide;
fLanguage :
English
Journal_Title :
Applied Superconductivity, IEEE Transactions on
Publisher :
ieee
ISSN :
1051-8223
Type :
jour
DOI :
10.1109/TASC.2003.814052
Filename :
1211729
Link To Document :
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