Title :
Artificial Dielectric Shields forIntegrated Transmission Lines
Author :
Ma, Yue ; Rejaei, Behzad ; Zhuang, Yan
Author_Institution :
Lab. of High Freq. Technol. & Component, Delft Univ. of Technol., Delft
fDate :
7/1/2008 12:00:00 AM
Abstract :
We present a novel shielding method for on-chip transmission lines built on conductive silicon substrates. The shield consists of an artificial dielectric with a very high in-plane dielectric constant, built from two patterned metal layers isolated by a very thin dielectric film. Inserted below an integrated coplanar transmission line, the artificial dielectric layer blocks the electric field of the line from entering the silicon substrate. Shielded coplanar waveguides fabricated on a conventional silicon wafer show a two- to three-fold loss reduction compared to unshielded lines at frequencies below 30 GHz.
Keywords :
coplanar transmission lines; coplanar waveguides; dielectric thin films; permittivity; shielding; artificial dielectric shields; conductive silicon substrates; in-plane dielectric constant; integrated coplanar transmission line; onchip transmission lines; patterned metal layers; shielded coplanar waveguides; thin dielectric film; unshielded lines; Artificial dielectric layer (ADL); high ${k}$ dielectric; integrated transmission line; radio frequency (RF)/microwave substrate loss; shield;
Journal_Title :
Microwave and Wireless Components Letters, IEEE
DOI :
10.1109/LMWC.2008.924907
