Polymer long-period raised rib waveguide gratings using nano-imprint lithography

Author

Perentos, Andreas ; Kostovski, Gorgi ; Mitchell, Arnan

Author_Institution

Microelectron. & Mater. Technol. Centre, RMIT Univ., Melbourne, Vic., Australia

Volume

17

Issue

12

fYear

2005

Firstpage

2595

Lastpage

2597

Abstract

This letter presents the fabrication and demonstration of a long-period raised rib waveguide grating using nano-imprint lithography. The device consists of a lower UV15 cladding, where relief-gratings are implemented, and an NOA73 raised rib core waveguide. Spectral transmission reveals a resonance at 1585 nm with about 10-dB rejection and 12-nm linewidth.

Keywords

claddings; diffraction gratings; integrated optics; optical fabrication; optical polymers; optical waveguide components; rib waveguides; soft lithography; spectral line breadth; 1585 nm; UV15 cladding; grating fabrication; long-period gratings; nanoimprint lithography; polymer gratings; raised rib waveguide gratings; relief-gratings; spectral transmission; Gratings; Lithography; Optical device fabrication; Optical planar waveguides; Optical polymers; Optical resonators; Optical waveguides; Planar waveguides; Resonance; Silicon; Long-period waveguide gratings (LPWGs); nano-imprint lithography (NIL); optical polymers; optical waveguide filters; polydimethylsiloxane (PDMS); soft lithography;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2005.859130

Filename

1542160