Title :
Control of unwanted light in silicon waveguide circuits
Author_Institution :
Dept. of Eng. Sci., Oxford Univ., UK
Abstract :
We describe the design and fabrication of a stray light attenuator for silicon waveguide circuits. Using the attenuator, we demonstrate the fabrication of multimode interference couplers with uniformity accurate to better than 0.05 dB.
Keywords :
integrated optics; optical control; optical couplers; optical design techniques; optical fabrication; optical waveguides; silicon; Si; attenuator design; attenuator fabrication; multimode interference couplers; silicon waveguide circuits; stray light attenuator; unwanted light control; Circuits; Interference; Lighting control; Optical attenuators; Optical device fabrication; Optical modulation; Optical waveguides; Semiconductor waveguides; Silicon; Stray light; Integrated optics; multimode interference (MMI) couplers; silicon photonics; stray light;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2005.859159
