MgO substrate surface optimization for YBaCuO thin film growth

Author

Dégardin, Annick F. ; Houzé, Frédéric ; Kreisler, Alain J.

Author_Institution

Lab. de Genie Electrique de Paris, Universites Paris, Gif-sur-Yvette, France

Volume

13

Issue

2

fYear

2003

fDate

6/1/2003 12:00:00 AM

Firstpage

2721

Lastpage

2724

Abstract

To obtain high quality Y₁Ba₂Cu₃O_7-x (YBaCuO) films grown on [001] MgO substrates, we have investigated the influence of high temperature substrate annealing prior to film deposition. In particular, we discuss the effect of annealing conditions (atmosphere, temperature and time) on MgO substrate morphology observed with atomic force microscopy. Thermal treatment under specific conditions resulted in the formation of [001]-oriented terraces bounded by [100]-oriented steps on the substrate surface. An improvement in the crystalline quality, as well as better DC electrical properties and microwave surface resistance values, has been observed for films sputtered onto substrate surfaces exhibiting such regular nanoscale step structures.

Keywords

annealing; atomic force microscopy; barium compounds; high-temperature superconductors; magnesium compounds; sputtered coatings; substrates; superconducting thin films; surface resistance; surface structure; yttrium compounds; DC electrical properties; MgO; MgO substrate; Y₁Ba₂Cu₃O₇; YBaCuO thin film growth; atomic force microscopy; crystalline quality; high temperature annealing; microwave surface resistance; sputter deposition; step structure; surface morphology; thermal treatment; Annealing; Atmosphere; Atomic force microscopy; Substrates; Surface morphology; Surface resistance; Surface treatment; Temperature; Transistors; Yttrium barium copper oxide;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/TASC.2003.811966

Filename

1212182