Title :
MgO substrate surface optimization for YBaCuO thin film growth
Author :
Dégardin, Annick F. ; Houzé, Frédéric ; Kreisler, Alain J.
Author_Institution :
Lab. de Genie Electrique de Paris, Universites Paris, Gif-sur-Yvette, France
fDate :
6/1/2003 12:00:00 AM
Abstract :
To obtain high quality Y1Ba2Cu3O7-x (YBaCuO) films grown on [001] MgO substrates, we have investigated the influence of high temperature substrate annealing prior to film deposition. In particular, we discuss the effect of annealing conditions (atmosphere, temperature and time) on MgO substrate morphology observed with atomic force microscopy. Thermal treatment under specific conditions resulted in the formation of [001]-oriented terraces bounded by [100]-oriented steps on the substrate surface. An improvement in the crystalline quality, as well as better DC electrical properties and microwave surface resistance values, has been observed for films sputtered onto substrate surfaces exhibiting such regular nanoscale step structures.
Keywords :
annealing; atomic force microscopy; barium compounds; high-temperature superconductors; magnesium compounds; sputtered coatings; substrates; superconducting thin films; surface resistance; surface structure; yttrium compounds; DC electrical properties; MgO; MgO substrate; Y1Ba2Cu3O7; YBaCuO thin film growth; atomic force microscopy; crystalline quality; high temperature annealing; microwave surface resistance; sputter deposition; step structure; surface morphology; thermal treatment; Annealing; Atmosphere; Atomic force microscopy; Substrates; Surface morphology; Surface resistance; Surface treatment; Temperature; Transistors; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
DOI :
10.1109/TASC.2003.811966
