DocumentCode
1241355
Title
YBa2Cu3O7-x deposition of large moving plates for continuous processing
Author
Hoffmann, Ch ; Lümkemann, A. ; Schmatz, U. ; Bauer, M. ; Metzger, R. ; Berberich, P. ; Kinder, H.
Author_Institution
Physikdepartment E10, Technische Univ. Munchen, Munich, Germany
Volume
13
Issue
2
fYear
2003
fDate
6/1/2003 12:00:00 AM
Firstpage
2879
Lastpage
2881
Abstract
YBa2Cu3O7-x thin films can be deposited on substrates up to 20 cm × 20 cm using thermal reactive co-evaporation with a linear reciprocating oxygen pocket. In order to coat larger area or in a continuous way, the substrate has to be moved through the deposition zone. Therefore, the substrate is fixed in a slide and shuttled by a transport system. On small samples critical current densities (Jc) over 3 MA/cm2 were achieved while on 10 cm × 20 cm sapphire substrates a Jc of 2.2 MA/cm2 could be reached. On ion-beam-assisted deposition (IBAD) buffered aluminum oxide ceramic we attain critical current densities of 1.4 MA/cm2 and 1.5 MA/cm2 on IBAD buffered metal tapes.
Keywords
barium compounds; critical current density (superconductivity); high-temperature superconductors; superconducting thin films; vacuum deposited coatings; vacuum deposition; yttrium compounds; 10 cm; 20 cm; Al2O3; IBAD buffered aluminum oxide; YBa2Cu3O7; YBa2Cu3O7 thin film; critical current density; substrates; thermal reactive co-evaporation; Atomic layer deposition; Boats; Critical current density; Oxidation; Production; Sputtering; Substrates; Superconducting thin films; Temperature; Yttrium barium copper oxide;
fLanguage
English
Journal_Title
Applied Superconductivity, IEEE Transactions on
Publisher
ieee
ISSN
1051-8223
Type
jour
DOI
10.1109/TASC.2003.812030
Filename
1212223
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